Investigation on effect of surface roughness pattern to dynamic performance of mems resonators in various types of gases and gas rarefaction

Lam Minh Thinh; Phan Minh Truong; Trinh Xuan Thang; Ngo Vo Ke Thanh; Le Quoc Cuong; Nguyen Chi Cuong

doi:10.15625/2525-2518/59/5/15478

Author affiliations

Authors

Lam Minh Thinh Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon Hi-Tech-Park, district 9, Ho Chi Minh city, Viet Nam
Phan Minh Truong Institute for Computational Science and Technology, Room 311(A&B), SBI building, Quang Trung Software City, Tan Chanh Hiep ward, district 12, Ho Chi Minh city, Viet Nam
Trinh Xuan Thang Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon Hi-Tech-Park, district 9, Ho Chi Minh city, Viet Nam
Ngo Vo Ke Thanh Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon Hi-Tech-Park, district 9, Ho Chi Minh city, Viet Nam
Le Quoc Cuong Department of Information and Communications, Ho Chi Minh City, Viet Nam, 59 Ly Tu Trong street, Ben Nghe ward, district 1, Ho Chi Minh city, Viet Nam
Nguyen Chi Cuong Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon Hi-Tech-Park, district 9, Ho Chi Minh city, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/59/5/15478

Keywords:

Quality factor of micro-beam resonator, squeeze film damping (SFD), surface roughness, gas rarefaction, types of gases.

Abstract

The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughness pattern in various types of gases and gas rarefaction. Then, effect of surface roughness pattern (film thickness ratio and Peklenik number) is discussed on the quality factor (Q-factor) of micro-beam resonators in various types of gases and gas rarefaction. Thus, effect of surface roughness pattern is significantly reduced as effective viscosity of gas decreases in higher mode of resonator and higher gas rarefaction.

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