INVESTIGATION ON EFFECT OF SURFACE ROUGHNESS PATTERN TO DYNAMIC PERFORMANCE OF MEMS RESONATORS IN VARIOUS TYPES OF GASES AND GAS RAREFACTION

Authors

  • Nguyen Chi Cuong Research Laboratories of Saigon High-Tech-Park, Ho Chi Minh City, Vietnam,
  • Lam Minh Thinh Research Laboratories of Saigon High-Tech-Park, Ho Chi Minh City, Vietnam,
  • Phan Minh Truong Institute for Computational Science and Technology, Ho Chi Minh City, Vietnam,
  • Trinh Xuan Thang Research Laboratories of Saigon High-Tech-Park, Ho Chi Minh City, Vietnam,
  • Ngo Vo Ke Thanh Research Laboratories of Saigon High-Tech-Park, Ho Chi Minh City, Vietnam,
  • Le Quoc Cuong Department of Information and Communications, Ho Chi Minh City, Vietnam,

DOI:

https://doi.org/10.15625/2525-2518/59/5/15478

Keywords:

Quality factor of micro-beam resonator, squeeze film damping (SFD), surface roughness, gas rarefaction, types of gases.

Abstract

The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughness pattern in various types of gases and gas rarefaction. Then, effect of surface roughness pattern (film thickness ratio and Peklenik number) is discussed on the quality factor (Q-factor) of micro-beam resonators in various types of gases and gas rarefaction. Thus, effect of surface roughness pattern is significantly reduced as effective viscosity of gas decreases in higher mode of resonator and higher gas rarefaction.

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Published

2021-10-26

How to Cite

Cuong, N. C., Thinh, L. M., Truong, P. M., Thang, T. X., Thanh, N. V. K., & Cuong, L. Q. (2021). INVESTIGATION ON EFFECT OF SURFACE ROUGHNESS PATTERN TO DYNAMIC PERFORMANCE OF MEMS RESONATORS IN VARIOUS TYPES OF GASES AND GAS RAREFACTION. Vietnam Journal of Science and Technology, 59(5). https://doi.org/10.15625/2525-2518/59/5/15478

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Section

Mechanical Engineering - Mechatronics