Simulation and analysis of a novel micro-beam type of MEMS strain sensors

Nguyen Chi Cuong, Trinh Xuan Thang, Tran Duy Hoai, Nguyen Thanh Phuong, Vu Le Thanh Long, Truong Huu Ly, Hoang Ba Cuong, Ngo Vo Ke Thanh
Author affiliations

Authors

  • Nguyen Chi Cuong Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Trinh Xuan Thang Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Tran Duy Hoai Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Nguyen Thanh Phuong Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Vu Le Thanh Long Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Truong Huu Ly Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Hoang Ba Cuong Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam
  • Ngo Vo Ke Thanh Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 street, Saigon High-Tech-Park, District 9, Ho Chi Minh City, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/57/6/13905

Keywords:

MEMS strain sensor, SHMS, piezoresistive, Stress, Strain

Abstract

A new structure of a micro-strain beam type of Micro-Electro-Mechanical-Systems (MEMS) strain gauge is proposed and simulated. The stress and strain distributions of MEMS strain gauge are evaluated in x and y directions by 2D FEM simulation, respectively. The results showed that the longitudinal stress and strain distributions of strain beam enhance significantly, while the transverse stress and strain distributions are almost unchanged in the whole structure of MEMS strain gauge. High sensitivity of piezoresistive MEMS strain sensors can be designed to detect only one single direction of the stress and strain on the material objects.

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Published

20-11-2019

How to Cite

[1]
N. C. Cuong, “Simulation and analysis of a novel micro-beam type of MEMS strain sensors”, Vietnam J. Sci. Technol., vol. 57, no. 6, pp. 762–772, Nov. 2019.

Issue

Vol. 57 No. 6 (2019)

Section

Mechanical Engineering - Mechatronics

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