Investigation of coupled effects of temperature and relative humidity on dynamic performance of MEMS beam resonators in gas rarefaction

Nguyen Chi Cuong; Trinh Xuan Thang; Truong Van Phat; Vu Manh Giap; Ngo Vo Ke Thanh

doi:10.15625/2525-2518/57/3/13123

Author affiliations

Authors

Nguyen Chi Cuong Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Viet Nam
Trinh Xuan Thang Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Viet Nam
Truong Van Phat Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Viet Nam
Vu Manh Giap Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Viet Nam
Ngo Vo Ke Thanh Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/57/3/13123

Keywords:

MEMS cantilever resonators, Quality factor, relative humidity, temperature, gas rarefaction

Abstract

The modified molecular gas lubrication (MMGL) equation with the effective viscosity of moist air is utilized to solve for the squeeze film damping (SFD) problem on the dynamic performance of MEMS cantilever resonators. Thus, the coupled effects of temperature and relative humidity are discussed on the Q-factors of MEMS cantilever resonators in a wide range of gas rarefaction (pressure, p and accommodation coefficients, ACs) and resonant mode of vibration. The results showed that the Q-factor of moist air decreases more significantly as temperature and relative humidity increase at higher gas rarefaction (lower p, and ACs) conditions.

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