SOI photonic crystal waveguides operating in telecommunication range for integrated circuits

Hoang Thi Hong Cam, Trinh Duc Anh, Pham Thanh Binh, Pham Van Dai, Nguyen Thuy Van, Pham Van Hoi
Author affiliations

Authors

  • Hoang Thi Hong Cam University of Science and Technology of Hanoi, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam
  • Trinh Duc Anh University of Science and Technology of Hanoi, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam
  • Pham Thanh Binh Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam
  • Pham Van Dai Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam
  • Nguyen Thuy Van Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam
  • Pham Van Hoi Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Ha Noi, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/58/2/13957

Abstract

Silicon photonics has been of great interest and plays an significant role in optical communications. Various devices acting as the key components of integrated circuits can be generated based on silicon-on-insulator (SOI) platform. Among those, SOI photonic crystal waveguide (SOI PCW) have been considered as one of the most fundamental and essential elements. In this report, we present the design and the numerical property of SOI PCWs operating in telecommunication range, i.e., O-band (1260 – 1360 nm)with TE and/or TM polarizations. The SOI PCWsincluding conventional W1 and slot SOI PCWs have been designed in order to exploit two kinds of mode: W1-like and true-slot.For that purpose, the geometric parameters of the SOI PCW withthe triangular PhC structure are chosen as follows. The thickness of the silicon slab was fixed at 300 nm to match with the fabrication in industrial scale, the size of the hole was around 210 nm and the lattice constant was tuned in the range of 300 nm to 400 nm. The width of waveguide was modified fromW1 to W1.50 and the width of the slot was of about 100 nm. In addition,the covering materials were selected with refractive index of 1.0 corresponding to air as well as refractive indices of from 1.45 to 1.50 corresponding to the active materials. The demonstrated SOI PCWs in this work might find applications in optical integrated circuits and our investigation on the dependence of the dispersion on the width of waveguide and refractive index of the covering material will provide a general guide line for guiding signal and for monitoring or sensing purposes…

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Published

27-03-2020

How to Cite

[1]
H. T. H. Cam, T. D. Anh, P. T. Binh, P. V. Dai, N. T. Van, and P. V. Hoi, “SOI photonic crystal waveguides operating in telecommunication range for integrated circuits”, Vietnam J. Sci. Technol., vol. 58, no. 2, pp. 161–167, Mar. 2020.

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Section

Materials

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