Fabrication and characterization of pulsed electron beam deposited TiO2 thin films with glancing angle deposition techniques for biosensing application

Duy Dao Quang; Tri-Nghia Nguyen; Duy Thien Nguyen; Tung Nguyen Dinh Hai; Thi Huong Vu; Tuan Tu Le; Thanh Mai Vu; Van Vu Le

doi:10.15625/2525-2518/18203

Author affiliations

Authors

Quang-Duy Dao Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam https://orcid.org/0000-0002-5677-3737
Tri-Nghia Nguyen Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam
Duy Thien Nguyen Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam
Tung Nguyen Dinh Hai Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam
Thi Huong Vu Falculty of Chemistry, Hanoi National University of Education, 136 Xuan Thuy, Cau Giay, Ha Noi, Viet Nam
Tuan Tu Le Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam
Thanh Mai Vu Department of Mechanical and Nuclear Engineering, University of Sharjah, PO.BOX, 27272, Sharjah, United Arab Emirates
Van Vu Le Faculty of Physics, University of Science, Vietnam National University, Hanoi, 334 Nguyen Trai, Thanh Xuan, Ha Noi, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/18203

Keywords:

thin film, glancing angle deposition, titanium dioxide, pulsed electron deposition

Abstract

We demonstrated fabrication and characterization of TiO₂ thin films using pulsed electron deposition (PED) with glancing angle deposition (GLAD) techniques. The X-ray diffraction patterns and Raman spectra indicated that the fabricated TiO₂ thin films were formed in anatase phases with crystallite sizes of around 20.3 nm. By using the GLAD techniques, the surface morphology and optical properties of TiO₂ thin films were well controlled. In particular, the rod-like nanoparticles were probably raised up and the smoothness of the thin films was reduced when incident angles increased from 0º to 70º, which resulted from the self-shadowing mechanism. The absorption coefficient was reduced, the energy band gap increased, and the Raman peaks at 144 cm^-1 were vanished with increasing in incident angles in part due to changes in the thin film porosity and the crystallite sizes, which is proportional to the number of self-shadowed induced voiding sites. Furthermore, the non-enzymatic fluorescent glucose sensor using the PED-based TiO₂ thin films was demonstrated to explore the application potential of the fabricated materials.

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