Lithographic fabrication and spectroscopic characterization of a THz metamaterial absorber

Nguyen Thanh Tung, Le Hong Phuc
Author affiliations


  • Nguyen Thanh Tung School of Chemical Engineering, Hanoi University of Science and Technology, No 1, Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam
  • Le Hong Phuc Institute of Materials Science, Vietnam Academy of Science and Technology (VAST),18 Hoang Quoc Viet, Ha Noi, Viet Nam



perfect absorbers, metamaterials, infrared spectroscopy


THz metamaterial absorbers are often studied by computational techniques, where the influence of actual material parameters and fabricating limitation has not been completely understood. Here we present an experimental investigation on a far-infrared metamaterial absorber composed of a gold disk-shaped resonator, a silicon oxide spacer, and a gold film. The samples are fabricated using the UV laser lithography technique in combination with the electron-beam evaporation. The absorption feature of fabricated samples is examined by Fourier-transformed infrared spectroscopy and supported by finite integration simulations. 


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How to Cite

N. T. Tung and L. H. Phuc, “Lithographic fabrication and spectroscopic characterization of a THz metamaterial absorber”, Vietnam J. Sci. Technol., vol. 59, no. 1, pp. 40–46, Jan. 2021.




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