Application of the flux bending effect inan active flux-guide for low-noise planar vector TMR magnetic sensors

Luong Van Su; Nguyen Anh Tuan; Nguyen Anh Tue; Nguyen Tuyet Nga; Hoang Quoc Khanh; Nguyen Ngoc Lan; Nguyen Tuan Anh

doi:10.15625/2525-2518/56/6/12652

Author affiliations

Authors

Luong Van Su International Training Institute for Materials Science (ITIMS), Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam https://orcid.org/0000-0003-2061-7406
Nguyen Anh Tuan International Training Institute for Materials Science (ITIMS), Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam
Nguyen Anh Tue Institute of Engineering Physics (IEP),Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung,HaNoi, Viet Nam
Nguyen Tuyet Nga Institute of Engineering Physics (IEP),Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung,HaNoi, Viet Nam
Hoang Quoc Khanh International Training Institute for Materials Science (ITIMS), Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam
Nguyen Ngoc Lan International Training Institute for Materials Science (ITIMS), Ha Noi University of Science and Technology (HUST), Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam
Nguyen Tuan Anh Hanoi Community College (HCC), Trung Kinh, Cau Giay, HaNoi, Viet Nam

DOI:

https://doi.org/10.15625/2525-2518/56/6/12652

Keywords:

Low-frequency noise, Magnetometers, Magnetic fields, Modulation technique, TMR

Abstract

A concept of a planar vector magnetic sensor comprising in-plane tunnel magnetoresistive (TMR) sensors and an active flux-guide (AFG) was introduced in this work. The AFG redirected the magnetic flux at high-frequency benefiting the vertical detection capability and lessening the noise of the TMR at low-frequency measurement. The vertical sensitivity of 19.5 V/T was almost the similar the in-plane sensitivity of 19.2 V/T. In addition, the 1-Hz field noise was suppressed from 6 nT/sqrt-Hz down to 0.4 nT/sqrt-Hz. The flux bending effect of the AFG was also verified by the angular measurements with the deflected angle was found to be about 50º. It revealed that the vertical field component was certainly detected by the in-plane sensor and the proposed method was a feasible technique for the development of the low-noise planar three-dimensional magnetic sensor.

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