APPLICATION OF THE FLUX BENDING EFFECT IN AN ACTIVE FLUX-GUIDE FOR LOW-NOISE PLANAR VECTOR TMR MAGNETIC SENSORS

Authors

  • Van Su Luong ITIMS, Hanoi University of Science and Technology https://orcid.org/0000-0003-2061-7406
  • Anh Tuan Nguyen ITIMS, Hanoi University of Science and Technology
  • Anh Tue Nguyen IEP, Hanoi University of Science and Technology
  • Tuyet Nga Nguyen IEP, Hanoi University of Science and Technology
  • Quoc Khanh Hoang ITIMS, Hanoi University of Science and Technology
  • Ngoc Lan Nguyen ITIMS, Hanoi University of Science and Technology
  • Tuan Anh Nguyen Hanoi Community College (HCC)

DOI:

https://doi.org/10.15625/2525-2518/56/6/12652

Keywords:

Low-frequency noise, Magnetometers, Magnetic fields, Modulation technique, TMR

Abstract

A concept of a planar vector magnetic sensor comprising in-plane tunnel magnetoresistive (TMR) sensors and an active flux-guide (AFG) was introduced in this work. The AFG redirected the magnetic flux at high-frequency benefiting the vertical detection capability and lessening the noise of the TMR at low-frequency measurement. The vertical sensitivity of 19.5 V/T was almost the similar the in-plane sensitivity of 19.2 V/T. In addition, the 1-Hz field noise was suppressed from 6 nT/sqrt-Hz down to 0.4 nT/sqrt-Hz. The flux bending effect of the AFG was also verified by the angular measurements with the deflected angle was found to be about 50º. It revealed that the vertical field component was certainly detected by the in-plane sensor and the proposed method was a feasible technique for the development of the low-noise planar three-dimensional magnetic sensor.

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Published

2018-12-17

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Section

Materials