Fabrication and characterization of micromachined piezoresistive displacement sensors
Author affiliations
DOI:
https://doi.org/10.15625/0866-708X/48/1/1095Abstract
Summarry
Silicon micromachined displacement sensors have been designed and fabricated successfully by the MEMS group at ITIMS. The structure of the sensors consists of a membrane with a stiff center. The membrane thickness is about 30 microns. The stiff center serves as a forced point and is linked to a movement system. The mechanical signal is converted into output voltage signal by a Wheatstone resistor bridge or a four-terminal gage made by diffusion on the membrane. In this paper, the configuration, fabrication process and characteristics of sensor have been presented.
Downloads
Downloads
Published
How to Cite
Issue
Section
License
Vietnam Journal of Sciences and Technology (VJST) is an open access and peer-reviewed journal. All academic publications could be made free to read and downloaded for everyone. In addition, articles are published under term of the Creative Commons Attribution-ShareAlike 4.0 International (CC BY-SA) Licence which permits use, distribution and reproduction in any medium, provided the original work is properly cited & ShareAlike terms followed.
Copyright on any research article published in VJST is retained by the respective author(s), without restrictions. Authors grant VAST Journals System a license to publish the article and identify itself as the original publisher. Upon author(s) by giving permission to VJST either via VJST journal portal or other channel to publish their research work in VJST agrees to all the terms and conditions of https://creativecommons.org/licenses/by-sa/4.0/ License and terms & condition set by VJST.
Authors have the responsibility of to secure all necessary copyright permissions for the use of 3rd-party materials in their manuscript.
