Mechanical response of outer frames in tuning fork gyroscope model with connecting diamond-shaped frame
Author affiliations
DOI:
https://doi.org/10.15625/0866-7136/12889Keywords:
tuning fork gyroscope, anti-phase mode, mechanical responseAbstract
In tuning fork micro-gyroscopes, two outer frames are connected by using the linking elements. The driving vibrations of the two outer frames are required to be exactly opposite to generate the opposite sensing modes perpendicular to driving direction. These opposite driving vibrations are provided by a mechanical structure named the diamond-shaped frame. This paper presents mechanical responses of two outer frames in a proposed model of tuning fork gyroscope when an external force with different types is applied to them. The results show that the presence of a diamond-shaped frame guarantees the absolute anti-phase mode for the driving vibrations of outer frames.
Downloads
References
C. Acar and A. Shkel. MEMS vibratory gyroscopes: structural approaches to improve robustness. Springer Science & Business Media, (2008).
A. M. Shkel, R. Horowitz, A. A. Seshia, S. Park, and R. T. Howe. Dynamics and control of micromachined gyroscopes. In Proceedings of the American Control Conference, Vol. 3. IEEE, (1999), pp. 2119–2124.
W. Yongpeng and S. Huilin. Modeling and simulation for a vibratory tuning-fork MEMS gyroscope. In Third International Conference on Measuring Technology and Mechatronics Automation (ICMTMA), Vol. 2. IEEE, (2011), pp. 605–608.
V. Apostolyuk and F. E. H. Tay. Dynamics of micromechanical Coriolis vibratory gyroscopes. Sensor Letters, 2, (3-4), (2004), pp. 252–259. https://doi.org/10.1166/sl.2004.057.
B. Choi, S. Y. Lee, T. Kim, and S. S. Baek. Dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope. Sensors, 8, (6), (2008), pp. 3706–3718. https://doi.org/10.3390/s8063706.
Y. Guan, S. Gao, L. Jin, and L. Cao. Design and vibration sensitivity of a MEMS tuning fork gyroscope with anchored coupling mechanism. Microsystem Technologies, 22, (2), (2016), pp. 247–254. https://doi.org/10.1007/s00542-014-2405-3.
Y. Guan, S. Gao, H. Liu, L. Jin, and S. Niu. Design and vibration sensitivity analysis of a MEMS tuning fork gyroscope with an anchored diamond coupling mechanism. Sensors, 16, (4), (2016), p. 468. https://doi.org/10.3390/s16040468.
T. Q. Trinh, L. Q. Nguyen, D. V. Dao, H. M. Chu, and H. N. Vu. Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling. Microsystem Technologies, 20, (2), (2014), pp. 281–289. https://doi.org/10.1007/s00542-013-1947-0.
M. N. Nguyen, N. S. Ha, L. Q. Nguyen, H. M. Chu, and H. N. Vu. Z-axis micromachined tuning fork gyroscope with low air damping. Micromachines, 8, (2), (2017), p. 42. https://doi.org/10.3390/mi8020042.
V. V. The, T. Q. Dung, V. M. Hoan, and C. D. Trinh. Studying of dynamic response of a diamond-shaped micro silicon frame. Journal of Science and Technique, Military Technical Academy, 186, (2017), pp. 34–42.
V. V. The, T. Q. Dung, and C. D. Trinh. Dynamic analysis of a single MEMS vibratory gyroscope with decoupling connection between driving frame and sensing proof mass. International Journal of Applied Engineering Research, 13, (7), (2018), pp. 5554–5561.
Downloads
Published
Issue
Section
License
This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.