Attenuation coefficient for surface acoustic waves in fluid region
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DOI:
https://doi.org/10.15625/0866-7136/34/4/2335Keywords:
Rayleigh – Surface Acoustic Wave sensor (R–SAW), liquid sensor, Aluminium NitrideAbstract
In recent years, surface acoustic wave devices used in bio-sensing applications have demonstrated high sensitivity in the detection of fluid properties such as density, viscosity, stream velocity. In this paper, a more effective measurement of the SAWsensorstructure is presented. It is reported that at density of 6 g/cm3, the amplitude of mechanical wave is excited while for electrical signal, attenuation at 3 g/cm3 reaches a peak.In our analysis, single–crystal Aluminium Nitride substrate is used. Several parameters of leaky waves including displacement, decay constant in the liquid media are analyzed.
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