Three-axis piezoresistive accelerometer with adjustable axial resolutions

Bui Thu Hang, Tran Duc Tan, Chu Duc Trinh
Author affiliations

Authors

  • Bui Thu Hang University of Engineering and Technology, VNU, Vietnam
  • Tran Duc Tan University of Engineering and Technology, VNU, Vietnam
  • Chu Duc Trinh University of Engineering and Technology, VNU, Vietnam

DOI:

https://doi.org/10.15625/0866-7136/34/1/427

Keywords:

MicroElectroMechanical Systems (MEMS), accelerometer, piezoresistance

Abstract

A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

Downloads

Download data is not yet available.

Downloads

Published

01-03-2012

Issue

Section

Research Article