Three-axis piezoresistive accelerometer with adjustable axial resolutions

Authors

  • Bui Thu Hang University of Engineering and Technology, VNU
  • Tran Duc Tan University of Engineering and Technology, VNU
  • Chu Duc Trinh University of Engineering and Technology, VNU

DOI:

https://doi.org/10.15625/0866-7136/34/1/427

Keywords:

MicroElectroMechanical Systems (MEMS), accelerometer, piezoresistance

Abstract

A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

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Published

01-03-2012

How to Cite

Hang, B. T., Tan, T. D., & Trinh, C. D. (2012). Three-axis piezoresistive accelerometer with adjustable axial resolutions. Vietnam Journal of Mechanics, 34(1), 45–54. https://doi.org/10.15625/0866-7136/34/1/427

Issue

Section

Research Paper