Three-axis piezoresistive accelerometer with adjustable axial resolutions
Keywords:MicroElectroMechanical Systems (MEMS), accelerometer, piezoresistance
A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.
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