Three-axis piezoresistive accelerometer with adjustable axial resolutions

Bui Thu Hang, Tran Duc Tan, Chu Duc Trinh
Author affiliations

Authors

  • Bui Thu Hang University of Engineering and Technology, VNU, Vietnam
  • Tran Duc Tan University of Engineering and Technology, VNU, Vietnam
  • Chu Duc Trinh University of Engineering and Technology, VNU, Vietnam

DOI:

https://doi.org/10.15625/0866-7136/34/1/427

Keywords:

MicroElectroMechanical Systems (MEMS), accelerometer, piezoresistance

Abstract

A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

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Published

01-03-2012

Issue

Vol. 34 No. 1 (2012)

Section

Research Article

License

Creative Commons License

This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.

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