Three-axis piezoresistive accelerometer with adjustable axial resolutions

Bui Thu Hang, Tran Duc Tan, Chu Duc Trinh


A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.


MicroElectroMechanical Systems (MEMS); accelerometer; piezoresistance

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