Size-dependent behavior of a MEMS microbeam under electrostatic actuation


  • Cong Ich Le Le Quy Don Technical University, 236 Hoang Quoc Viet street, Hanoi, Vietnam
  • Quang Dung Tran Le Quy Don Technical University, 236 Hoang Quoc Viet street, Hanoi, Vietnam
  • Van Dung Lam Le Quy Don Technical University, 236 Hoang Quoc Viet street, Hanoi, Vietnam
  • Dinh Kien Nguyen Institute of Mechanics, VAST, 264 Doi Can street, Hanoi, Vietnam



microbeam, modified couple stress theory, electrostatic actuation, refined third-order shear deformation theory, nonlinear finite element analysis


The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are derived from Hamilton’s principle, and they are transferred to a discretized form using a two-node beam element. Newton-Raphson based iterative procedure is used in conjunction with Newmark method to obtain the pull-in voltages and deflections of a clamped-clamped microbeam under electrostatic actuation. The influence of the axial force, applied voltage and material length scale parameter on the behavior of the beam is studied in detail and highlighted.


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How to Cite

Le, C. I., Tran, Q. D., Lam, V. D., & Nguyen, D. K. (2022). Size-dependent behavior of a MEMS microbeam under electrostatic actuation. Vietnam Journal of Mechanics, 44(1), 69–81.



Research Paper