An analytical nonlinear displacement model of electrothermal V-shaped actuator
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https://doi.org/10.15625/0866-7136/20980Keywords:
nonlinear strain-displacement relation, nonlinear displacement, electrothermal V-shaped actuator (EVA), thermal-mechanical modelAbstract
This work presents an analytical model to determine nonlinear displacements of electrothermal V-shaped actuators. The nonlinear displacement model of V-shaped beams fixed at both ends is established based on considering the axial deformation of the beam. The 3D model of the V-shaped microactuator was established to verify the theoretical nonlinear model. The evaluation shows that the displacement deviation between the analytical nonlinear model and simulation is approximately 7.7% at the driving voltage of 16 V. This confirms the advantages of the proposed model to predict more precisely the displacement of the electrothermal V-shaped actuator.
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References
A. Potekhina and C. Wang. Review of electrothermal actuators and applications. Actuators, 8, (2019).
Z. Zhang, Y. Yu, X. Liu, and X. Zhang. A comparison model of V- and Z-shaped electrothermal microactuators. In 2015 IEEE International Conference on Mechatronics and Automation (ICMA), IEEE, (2015), pp. 1025–1030.
P. Shivhare, G. Uma, and M. Umapathy. Design enhancement of a chevron electrothermally actuated microgripper for improved gripping performance. Microsystem Technologies, 22, (2015), pp. 2623–2631.
T. Hu, Y. Zhao, X. Li, Y. Zhao, and Y. Bai. Design and fabrication of an electro-thermal linear motor with large output force and displacement. In 2016 IEEE SENSORS, IEEE, (2016).
H. D. Espinosa, Y. Zhu, and N. Moldovan. Design and operation of a MEMS-based material testing system for nanomechanical characterization. Journal of Microelectromechanical Systems, 16, (2007), pp. 1219–1231.
T. Hu, Y. Zhao, X. Li, Y. Zhao, and Y. Bai. Integration design of MEMS electrothermal safety-and-arming devices. Microsystem Technologies, 23, (2016), pp. 953–958.
Z. Zhang, W. Zhang, Q. Wu, Y. Yu, X. Liu, and X. Zhang. Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators. Journal of Micromechanics and Microengineering, 27, (2016).
Z. Zhang, Y. Yu, X. Liu, and X. Zhang. Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators. Microsystem Technologies, 23, (2016), pp. 3775–3789.
C. D. Lott, T. W. McLain, J. N. Harb, and L. L. Howell. Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator. Sensors and Actuators A: Physical, 101, (2002), pp. 239–250.
T. Shan, X. Qi, L. Cui, and X. Zhou. Thermal behavior modeling and characteristics analysis of electrothermal microactuators. Microsystem Technologies, 23, (2016), pp. 2629–2640.
D. T. Nguyen, K. T. Hoang, and P. H. Pham. Heat transfer model and critical driving frequency of electrothermal V-shaped actuators. In Lecture Notes in Networks and Systems, Springer International Publishing, Vol. 104, (2019), pp. 394–405.
K. T. Hoang, D. T. Nguyen, and P. H. Pham. Impact of design parameters on working stability of the electrothermal V-shaped actuator. Microsystem Technologies, 26, (2019), pp. 1479–1487.
Y. Zhu, A. Corigliano, and H. D. Espinosa. A thermal actuator for nanoscale in situ microscopy testing: design and characterization. Journal of Micromechanics and Microengineering, 16, (2006), pp. 242–253.
M. Pustan, R. Chiorean, C. Birleanu, C. Dudescu, R. Muller, A. Baracu, and R. Voicu. Reliability design of thermally actuated MEMS switches based on V-shape beams. Microsystem Technologies, 23, (2016), pp. 3863–3871.
E. T. Enikov, S. S. Kedar, and K. V. Lazarov. Analytical model for analysis and design of V-shaped thermal microactuators. Journal of Microelectromechanical Systems, 14, (2005), pp. 788–798.
R. Hull. Properties of crystalline silicon, number 20. London: INSPEC, (1999).
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