Integration of CNTs thin film for sensing and actuating micro structures
Keywords:CNTs thin film, sensor, actuator, Seebeck effect, piezoresistive effect, micromirror
This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.
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Copyright (c) 2012 Vietnam Academy of Science and Technology
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