Integration of CNTs thin film for sensing and actuating micro structures

Dau Thanh Van, Bui Thanh Tung, Dao Viet Dzung, Susumu Sugiyama
Author affiliations

Authors

  • Dau Thanh Van Health and Crop Science Laboratory, Sumitomo Chemical Ltd., Hyogo, Japan
  • Bui Thanh Tung National Institute of Advanced Industrial Science and Technology (AIST), Japan
  • Dao Viet Dzung Griffith School of Engineering, Griffith University, GoldCoast Campus, Australia
  • Susumu Sugiyama Graduated School of Science and Engineering, Ritsumeikan University, Shiga, Japan

DOI:

https://doi.org/10.15625/0866-7136/34/4/2342

Keywords:

CNTs thin film, sensor, actuator, Seebeck effect, piezoresistive effect, micromirror

Abstract

This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.

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Published

30-11-2012

Issue

Vol. 34 No. 4 (2012)

Section

Research Article

License

Creative Commons License

This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.

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