Integration of CNTs thin film for sensing and actuating micro structures

Authors

  • Van Thanh Dau
  • Bui Thanh Tung
  • Dzung Viet Dao
  • Susumu Sugiyama

DOI:

https://doi.org/10.15625/0866-7136/34/4/2342

Keywords:

CNTs thin film, sensor, actuator, Seebeck effect, piezoresistive effect, micromirror

Abstract

This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.

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Published

30-11-2012

How to Cite

Dau, V. T., Tung, B. T., Dao, D. V., & Sugiyama, S. (2012). Integration of CNTs thin film for sensing and actuating micro structures. Vietnam Journal of Mechanics, 34(4), 299–309. https://doi.org/10.15625/0866-7136/34/4/2342

Issue

Section

Research Paper