Synthesis and properties of zirconium carbide film on graphite

Abstract

In this study, synthesis and properties of zirconium carbide on graphite will be introduced. CVD temperature and H₂ flow affect properties of ZrC film. The increased temperature and increased size of crystal ZrC reduce flatness of the surface; contrarily, the increased flow of H₂ and decreased size of crystal flatten the surface of porous film. The obtained results showed that CVD condition is suitable for producing uniform, consistent and flat ZrC film: temperature 1200 ^oC; H₂ flow at 20 ml/min; flows of Ar, gas at 30, 80 ml/min, respectively; ZrCl₄ 8 g/time, CVD time 1 hour.  Phase components of ZrC film mainly consist of two principal phases ZrC and carbon. Film thickness ranges from 10.5-15.5 mm; film coating is uniform, non-crack, and highly compact and the film’s medium hardness is 1943 kG/mm².

Keywords: Zirconium carbide, film, graphite, CVD.