TAM, Le Van; HIEU, Dang Van; VY, Nguyen Duy; HUNG, Vu Ngoc; HOANG, Chu Manh. Design and simulation analysis of an electrostatic actuator for improving the performance of scanning probe nanolithography. <b>Vietnam Journal of Science and Technology</b>, Hanoi, VN, v. 55, n. 4, p. 484–493, 2017. DOI: 10.15625/2525-2518/55/4/8803. Disponível em: https://vjs.ac.vn/jst/article/view/8803. Acesso em: 12 jan. 2026.