CUONG, Nguyen Chi; THANG, Trinh Xuan; PHAT, Truong Van; GIAP, Vu Manh; THANH, Ngo Vo Ke. Investigation of coupled effects of temperature and relative humidity on dynamic performance of MEMS beam resonators in gas rarefaction. <b>Vietnam Journal of Science and Technology</b>, Hanoi, VN, v. 57, n. 3, p. 366–380, 2019. DOI: 10.15625/2525-2518/57/3/13123. Disponível em: https://vjs.ac.vn/jst/article/view/13123. Acesso em: 10 jan. 2026.