Tam, L. V., Hieu, D. V., Vy, N. D., Hung, V. N., & Hoang, C. M. (2017). Design and simulation analysis of an electrostatic actuator for improving the performance of scanning probe nanolithography. <i>Vietnam Journal of Science and Technology</i>, <i>55</i>(4), 484–493. https://doi.org/10.15625/2525-2518/55/4/8803