Yin T-I, Nguyen TA. Molecules sensing layer design of piezoresistive cantilever sensor for higher surface stress sensitivity. Vietnam J. Mech. [Internet]. 2012 Nov. 28 [cited 2024 Apr. 25];34(4):311-20. Available from: https://vjs.ac.vn/index.php/vjmech/article/view/2345