Van DT, Tung BT, Dzung DV, Sugiyama S. Integration of CNTs thin film for sensing and actuating micro structures. Vietnam J. Mech. [Internet]. 2012 Nov. 30 [cited 2024 Apr. 20];34(4):299-30. Available from: https://vjs.ac.vn/index.php/vjmech/article/view/2342