Huy, Vu Le, and Shoji Kamiya. “A Direct Evidence of Fatigue Damage Growth Inside Silicon MEMS Structures Obtained With EBIC Technique”. Vietnam Journal of Mechanics 36, no. 2 (June 10, 2014): 109–118. Accessed May 8, 2024. https://vjs.ac.vn/index.php/vjmech/article/view/3376.