Phuc, P. H., Toan, D. K., Lam, D. B., Khoa, N. T. and Dung, N. T. (2012) “Design and fabrication of the trapezoidal electrostatic comb-drive actuator”, Vietnam Journal of Mechanics. Hanoi, Vietnam, 34(4), pp. 261–269. doi: 10.15625/0866-7136/34/4/2338.