HUY, V. L.; KAMIYA, S. A direct evidence of fatigue damage growth inside silicon MEMS structures obtained with EBIC technique. Vietnam Journal of Mechanics, Hanoi, Vietnam, v. 36, n. 2, p. 109–118, 2014. DOI: 10.15625/0866-7136/36/2/3376. Disponível em: https://vjs.ac.vn/index.php/vjmech/article/view/3376. Acesso em: 8 may. 2024.