PHUC, P. H.; TOAN, D. K.; LAM, D. B.; KHOA, N. T.; DUNG, N. T. Design and fabrication of the trapezoidal electrostatic comb-drive actuator. Vietnam Journal of Mechanics, Hanoi, Vietnam, v. 34, n. 4, p. 261–269, 2012. DOI: 10.15625/0866-7136/34/4/2338. Disponível em: https://vjs.ac.vn/index.php/vjmech/article/view/2338. Acesso em: 19 apr. 2024.