LE, C. I.; TRAN, Q. D.; LAM, V. D.; NGUYEN, D. K. Size-dependent behavior of a MEMS microbeam under electrostatic actuation. Vietnam Journal of Mechanics, Hanoi, Vietnam, v. 44, n. 1, p. 69–81, 2022. DOI: 10.15625/0866-7136/16834. Disponível em: https://vjs.ac.vn/index.php/vjmech/article/view/16834. Acesso em: 25 apr. 2024.