The effects of oxidized temperatures on microstructures, electrical and gas sensing properties of tin oxide nano thin films

Abstract

Nano thin films of tin oxide are synthesized by sputtering for gas sensors application. The fabrication includes of deposition tin metal thin films on thermally oxidized SiO₂ followed by thermal oxidation at 300^oC, 400^oC, 500^oC and 600^oC in air. The effect of oxidized temperatures on the morphologies; microstructure and gas sensing properties are investigated. Tin oxide tin films showed very high sensitivity to NO_x at ppm level. The nano thin film oxidized at 400 ^oC showed highest sensitivity compared to others.