Thinh LM, Truong PM, Thang TX, Thanh NVK, Cuong LQ, Cuong NC. Investigation on effect of surface roughness pattern to dynamic performance of mems resonators in various types of gases and gas rarefaction . Vietnam J. Sci. Technol. [Internet]. 2021 Oct. 26 [cited 2024 Apr. 20];59(5):643-61. Available from: https://vjs.ac.vn/index.php/jst/article/view/15478