Chi Cuong Nguyen, M. Truong Phan, X. Thang Trinh, Q. Cuong Le, and V. K. Thanh Ngo, “Effects of temperature and relative humidity on resonant frequency of mems cantilever resonators under atmospheric pressure”, Vietnam J. Sci. Technol., vol. 60, no. 4, pp. 726–738, Aug. 2022.