THINH, L. M.; TRUONG, P. M.; THANG, T. X.; THANH, N. V. K.; CUONG, L. Q.; CUONG, N. C. Investigation on effect of surface roughness pattern to dynamic performance of mems resonators in various types of gases and gas rarefaction . Vietnam Journal of Science and Technology, [S. l.], v. 59, n. 5, p. 643–661, 2021. DOI: 10.15625/2525-2518/59/5/15478. Disponível em: https://vjs.ac.vn/index.php/jst/article/view/15478. Acesso em: 29 mar. 2024.