Tan NV, Tung DH, Hipler R. Time Resolved TDLAS Investigation of Pre-ionization Effect in Dual HiPIMS Discharges. Comm. Phys. [Internet]. 2014 Oct. 6 [cited 2024 Apr. 25];24(3S2):45–51. Available from: https://vjs.ac.vn/index.php/cip/article/view/5051