Phuc, T. V., M. Kulik, A. P. Kobzev, and L. H. Khiem. “Study of Elemental Depth Distribution in the Multilayer Material \(\text{TiO}_2\)/\(\text{SiO}_2\)/Si by Rutherford Backscattering Spectrometry (RBS)”. Communications in Physics, vol. 29, no. 3SI, Oct. 2019, p. 393, doi:10.15625/0868-3166/29/3SI/14328.