PHUC, T. V.; KULIK, M.; KOBZEV, A. P.; KHIEM, L. H. Study of Elemental Depth Distribution in the Multilayer Material \(\text{TiO}_2\)/\(\text{SiO}_2\)/Si by Rutherford Backscattering Spectrometry (RBS). Communications in Physics, [S. l.], v. 29, n. 3SI, p. 393, 2019. DOI: 10.15625/0868-3166/29/3SI/14328. Disponível em: https://vjs.ac.vn/index.php/cip/article/view/14328. Acesso em: 18 jan. 2022.