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Phuc, T.V., Kulik, M., Kobzev, A.P. and Khiem, L.H. 2019. Study of Elemental Depth Distribution in the Multilayer Material \(\text{TiO}_2\)/\(\text{SiO}_2\)/Si by Rutherford Backscattering Spectrometry (RBS). Communications in Physics. 29, 3SI (Oct. 2019), 393. DOI:https://doi.org/10.15625/0868-3166/29/3SI/14328.