Analytical Possibilities of Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis Methods

Vu Duc Phu; Le Hong Khiem; A. P. Kobzev; M. Kulik

doi:10.15625/0868-3166/26/1/8287

Analytical Possibilities of Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis Methods

Vu Duc Phu, Le Hong Khiem, A. P. Kobzev, M. Kulik

Author affiliations

Authors

Vu Duc Phu Institute of Physics, Vietnam Academy of Science and Technology
Le Hong Khiem Institute of Physics, Vietnam Academy of Science and Technology
A. P. Kobzev Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, 141980 Dubna, Russia
M. Kulik Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

DOI:

https://doi.org/10.15625/0868-3166/26/1/8287

Keywords:

Rutherford backscattering spectrometry, elastic recoil detection analysis, depth profile, ion beam analysis

Abstract

This paper presents the results of an experimental study of three samples containing various elements in the near-surface layers. The depth profiles of all the elements of different atomic masses from hydrogen to silver were investigated by Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The experiments were performed by using the low-energy (about 2 MeV) ⁴He⁺ ion beams. The obtained results demonstrate the possibility of the RBS and ERDA methods in the investigation of depth profiles of any mass element with an atomic concentration of about 0.01 at.% and a depth resolution close to 10 nm.

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Published

20-07-2016

How to Cite

[1]

V. D. Phu, L. H. Khiem, A. P. Kobzev, and M. Kulik, “Analytical Possibilities of Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis Methods”, Comm. Phys., vol. 26, no. 1, p. 83, Jul. 2016.

IEEE

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Issue

Vol. 26 No. 1 (2016)

Section

Papers

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