View of Influence of Adhesion Layers on the Surface Morphology of Platinum-based Bottom Electrodes for Pb(Zr,Ti)O<SUB>3</SUB> Thin Films

Return to Article Details Influence of Adhesion Layers on the Surface Morphology of Platinum-based Bottom Electrodes for Pb(Zr,Ti)O<SUB>3</SUB> Thin Films Download Download PDF