Integration of CNTs thin film for sensing and actuating micro structures

Van Thanh Dau, Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama

Abstract


This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.

Keywords


CNTs thin film; sensor; actuator; Seebeck effect; piezoresistive effect; micromirror

Full Text:

PDF


DOI: https://doi.org/10.15625/0866-7136/34/4/2342 Display counter: Abstract : 32 views. PDF : 21 views.

Refbacks

  • There are currently no refbacks.


Copyright (c) 2012 Vietnam Academy of Science and Technology

 

                      

Editorial Office of Vietnam Journal of Mechanics

3rd Floor, A16 Building, 18B Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam

Tel: (+84) 24 3791 7103

Email: vjmech@vjs.ac.vn