Integration of CNTs thin film for sensing and actuating micro structures

Van Thanh Dau, Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama


This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.


CNTs thin film; sensor; actuator; Seebeck effect; piezoresistive effect; micromirror

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