Attenuation coefficient for surface acoustic waves in fluid region

Bui Thu Hang, Bui Duc Tung, Nguyen Tien Dat, Chu Duc Trinh


In recent years, surface acoustic wave devices used in bio-sensing applications have demonstrated high sensitivity in the detection of fluid properties such as density, viscosity, stream velocity. In this paper, a more effective measurement of the SAWsensorstructure is presented. It is reported that at density of 6 g/cm3, the amplitude of mechanical wave is excited while for electrical signal, attenuation at 3 g/cm3 reaches a peak.In our analysis, single–crystal Aluminium Nitride substrate is used. Several parameters of leaky waves including displacement, decay constant in the liquid media are analyzed.


Rayleigh – Surface Acoustic Wave sensor (R–SAW); liquid sensor; Aluminium Nitride

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