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Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator

Hoang Trung Kien, Vu Cong Ham, Pham Hong Phuc

Abstract


A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (i.e. in y-direction) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formula. Simulation and experimental results show that the change of ELCA' displacement is inappreciable while the range of driving frequency up to 27 Hz (error of 10% with driving voltage is a square wave). Moreover, the range of driving frequency for the ELCA can be extended up to 1 kHz with displacement amplitude error of 10% while the shape of driving voltage is a harmonic sine wave.


Keywords


Electrostatic Linear Comb Actuator (ELCA); driving frequency; dynamic parameters; displacement amplitude

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References


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DOI: https://doi.org/10.15625/0866-7136/13215

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