NGHIÊN CỨU CHẾ TẠO MÀNG MỎNG OXIT Er¬2O3 BẰNG PHƯƠNG PHÁP MOCVD TỪ TIỀN CHẤT Er(acac)3.phen

Abstract

In this paper, we report the structural and morphological properties of Er₂O₃ thin film grown on glass via metal-organic chemical vapor deposition method by making use Er(acac)₃.phen as the precusor. Some characterations of as-deposited and after-annealed films have been investigated by XRD and SEM methods. The obtained results shown that film annealed at 450^oC is crystallined with cubic phase and partical gains were calculated to be around 10 nm by the scherrer equation.